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CMOS Hotplate Chemical Microsensors
Langbeschreibung
The first comprehensive text on microhotplate-based chemical sensor systems in CMOS-technology covers all aspects of successful sensor prototyping: theoretical considerations for modelling, controller- and system design, simulation of circuits and microsensors, design considerations, microfabrication, packaging and testing. A whole family of metal-oxide based microsensor systems with increasing complexity is presented, including fully integrated sensor arrays. This represents one of the first examples of integrated nanomaterials, microtechnology and embedded circuitry.
Inhaltsverzeichnis
Miniaturized Metal-Oxide Sensors.- Thermal Modelling of CMOS Microhotplates.- Microhotplates in CMOS Technology.- Monolithic Gas Sensor Systems.- Microsensor Arrays.- Conclusion and Outlook.
Markus Graf: Degree in Physics: 1992-1999 University of Konstanz, Germany, Exchange year at the University Joseph-Fourier, Grenoble, France, Research Assistant: 1999 Microelectronic Center MIC, Lyngby, Denmark, PhD:1999-2004 Physical Electronics Laboratory, Swiss Federal Institute of Technology (ETH) Zurich, Switzerland, Postdoc: since Feb. 2004, Laureate of the Swiss Technology Award 2004 (together with Diego Barrettino, Stefano Taschini and Andreas Hierlemann) for the subjects covered by the book. Research interest: Integrated chemical sensors and CMOS-compatible micromachining.
ISBN-13:
9783642089107
Veröffentl:
2010
Erscheinungsdatum:
22.11.2010
Seiten:
140
Autor:
Markus Graf
Gewicht:
224 g
Format:
235x155x8 mm
Serie:
Microtechnology and MEMS
Sprache:
Englisch
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