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Resonant MEMS
Fundamentals, Implementation, and Application
Langbeschreibung
A must-have for any MEMS R&D group: for the first time fundamental and hard-to-come-by knowledge is combined in one ready reference.The book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then goes on to provide a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the latest applications of resonant MEMS, such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems.
ISBN-13:
9783527676361
Veröffentl:
2015
Seiten:
484
Autor:
Oliver Brand
Serie:
11, Advanced Micro and Nanosystems
eBook Typ:
PDF
eBook Format:
Reflowable
Kopierschutz:
2 - DRM Adobe
Sprache:
Englisch
147,99 €*
Lieferzeit: Sofort lieferbar
Alle Preise inkl. MwSt.