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Optical Microscanners and Microspectrometers using Thermal Bimorph Actuators
Langbeschreibung
Optical Microscanners and Microspectrometers using Thermal Bimorph Actuators shows how to design and fabricate optical microsystems using innovative technologies and and original architectures. A barcode scanner, laser projection mirror and a microspectrometer are explained in detail, starting from the system conception, discussing simulations, choice of cleanroom technologies, design, fabrication, device test, packaging all the way to the system assembly.
Inhaltsverzeichnis
1 Introduction.- 2 Basics for a thermally actuated micromirror.- 3 Microscanner technology.- 4 One-dimensional microscanner.- 5 Two-dimensional microscanner.- 6 Advanced Optical Filters of Porous Silicon.- 7 Micromachining using porous Silicon.- 8 Tunable Optical Filter and IR Gas Spectroscopy.- 9 Conclusions and outlook.- Appendices.- A.1 Complement to the curvature calculation due to residual stress.- A.2 Complement to the static temperature distribution calculation.- A.3 Large deflections.- References.- Symbols and Abbreviations.- Glossary of terms.- Acknowledgments.
ISBN-13:
9781475760835
Veröffentl:
2013
Seiten:
268
Autor:
Gerhard Lammel
Serie:
14, Microsystems
eBook Typ:
PDF
eBook Format:
EPUB
Kopierschutz:
1 - PDF Watermark
Sprache:
Englisch
149,79 €*
Lieferzeit: Sofort lieferbar
Alle Preise inkl. MwSt.