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Semiconductor Industrial Hygiene Handbook
Monitoring, Ventiliation, Equipment and Ergonomics
Langbeschreibung
This book provides a comprehensive review of the primary industrial hygiene topics relevant to semiconductor processing: chemical and physical agents, and ventilation systems. The book also has excellent chapters on newer industrial hygiene concerns that are not specific to the semiconductor industry: ergonomics, indoor air quality, personal protective equipment, plan review, and records retention. While much of the information in these chapters can be applied to all industries, the focus and orientation is specific to issues in the semiconductor industry.
Inhaltsverzeichnis
IntroductionIndustrial Hygiene MonitoringIndustrial Hygiene Monitoring: Physical AgentsVentilationPersonal Protective Equipment (PPE)Indoor Air Quality (IAQ)ErgonomicsIndustrial Hygiene RecordkeepingPlan ReviewAppendix A: Silicon Ingot and Wafer ManufacturingAppendix B: Silicon Device Manufacturing IntroductionAppendix C: III-V (GaAs)Appendix D: III-V Device: Microwave ICAppendix E: Ion Implanter Maintenance Safety ConsiderationsAppendix F: BibliographyGlossary and AcronymsIndex
ISBN-13:
9780815518976
Veröffentl:
1995
Seiten:
363
Autor:
David G. Baldwin
eBook Typ:
PDF
eBook Format:
EPUB
Kopierschutz:
2 - DRM Adobe
Sprache:
Englisch
143,00 €*
Lieferzeit: Sofort lieferbar
Alle Preise inkl. MwSt.